JPH0547356B2 - - Google Patents

Info

Publication number
JPH0547356B2
JPH0547356B2 JP61032932A JP3293286A JPH0547356B2 JP H0547356 B2 JPH0547356 B2 JP H0547356B2 JP 61032932 A JP61032932 A JP 61032932A JP 3293286 A JP3293286 A JP 3293286A JP H0547356 B2 JPH0547356 B2 JP H0547356B2
Authority
JP
Japan
Prior art keywords
filter
pressure chamber
main body
body case
moving means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61032932A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62191328A (ja
Inventor
Shingo Ichiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61032932A priority Critical patent/JPS62191328A/ja
Publication of JPS62191328A publication Critical patent/JPS62191328A/ja
Publication of JPH0547356B2 publication Critical patent/JPH0547356B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
JP61032932A 1986-02-19 1986-02-19 清浄作業台 Granted JPS62191328A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61032932A JPS62191328A (ja) 1986-02-19 1986-02-19 清浄作業台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61032932A JPS62191328A (ja) 1986-02-19 1986-02-19 清浄作業台

Publications (2)

Publication Number Publication Date
JPS62191328A JPS62191328A (ja) 1987-08-21
JPH0547356B2 true JPH0547356B2 (en]) 1993-07-16

Family

ID=12372696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61032932A Granted JPS62191328A (ja) 1986-02-19 1986-02-19 清浄作業台

Country Status (1)

Country Link
JP (1) JPS62191328A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4569230B2 (ja) * 2004-09-06 2010-10-27 パナソニック株式会社 ファンフイルターユニットの移動装置
JP4569551B2 (ja) * 2006-10-02 2010-10-27 パナソニック株式会社 フィルタ交換装置
CN103191790B (zh) * 2013-04-25 2015-04-08 北京世安科进实验室设备有限公司 一种负压保护型洁净工作台
CN104214928B (zh) * 2014-09-16 2018-05-01 苏州新盛超净化系统有限公司 无尘室室内安装和更换过滤器的装置
CN107020611A (zh) * 2017-05-08 2017-08-08 江苏瑞尔光学有限公司 一种用于镜片检验的检验桌

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593826U (ja) * 1982-06-28 1984-01-11 藤徳紙器株式会社 紙製容器

Also Published As

Publication number Publication date
JPS62191328A (ja) 1987-08-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term